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Filing Details

Issuer

Cik	Name	Symbol	Sector (SIC)	IRS No
1113232	Axcelis Technologies Inc	ACLS	Special Industry Machinery, Nec (3559)	341818596

Insiders

Cik	Name	Reported Address	Insider Title	Director	Officer	Large Shareholder	Other
1158015	G Mary Puma	C/O Axcelis Technologies, Inc. 108 Cherry Hill Drive Beverly MA 01915	Executive Chairperson	Yes	Yes	No	No

Reported Non-Derivative Transactions

Sec. Name	Acquisiton - Disposition	Date	Amount	Price	Remaning Holdings	Equity Swap Involved	Form Type	Code	Nature of Ownership	Explanation
Common Stock	Disposition	2023-05-25	19,722	$151.83	300,686	No	4	S	Direct

Equity Swap Involved	Form Type	Code	Nature of Ownership	Explanation
No	4	S	Direct

Reported Non-Derivative Holdings

Sec. Name	Remaning Holdings	Nature of Ownership	Explanation
Common Stock	5,000	Indirect	Held by Spouse

Footnotes

The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $151.71 to $151.99, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price.
Of the shares held as of May 25, 2023, 67,420 were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture.