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Filing Details

Issuer

Cik	Name	Symbol	Sector (SIC)	IRS No
1113232	Axcelis Technologies Inc	ACLS	Special Industry Machinery, Nec (3559)	341818596

Insiders

Cik	Name	Reported Address	Insider Title	Director	Officer	Large Shareholder	Other
1195654	C Lynnette Fallon	C/O Axcelis Technologies, Inc. 108 Cherry Hill Drive Beverly MA 01915	Executive Vp, Hr/Legal	No	Yes	No	No

Reported Non-Derivative Transactions

Sec. Name	Acquisiton - Disposition	Date	Amount	Price	Remaning Holdings	Equity Swap Involved	Form Type	Code	Nature of Ownership
Common Stock	Disposition	2023-05-16	628	$129.92	41,216	No	4	F	Direct
Common Stock	Disposition	2023-05-17	872	$137.69	40,344	No	4	F	Direct
Common Stock	Disposition	2023-05-18	2,410	$141.55	37,934	No	4	S	Direct

Equity Swap Involved	Form Type	Code	Nature of Ownership
No	4	F	Direct
No	4	F	Direct
No	4	S	Direct

Footnotes

These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units.
Represents the closing price of the common stock on the date of the tax withholding.
Of the shares held after this tax withholding forfeiture (and related vesting) on May 16, 2023, 22,086 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.
Of the shares held after this tax withholding forfeiture (and related vesting) on May 17, 2023, 20,121 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.
Of the shares held after this sale on May 18, 2023, 20,121 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.