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Filing Details

Issuer

Cik	Name	Symbol	Sector (SIC)	IRS No
1113232	Axcelis Technologies Inc	ACLS	Special Industry Machinery, Nec (3559)	341818596

Insiders

Cik	Name	Reported Address	Insider Title	Director	Officer	Large Shareholder	Other
1158015	G Mary Puma	C/O Axcelis Technologies, Inc. 108 Cherry Hill Drive Beverly MA 01915	President And Ceo	Yes	Yes	No	No

Reported Non-Derivative Transactions

Sec. Name	Acquisiton - Disposition	Date	Amount	Price	Remaning Holdings	Equity Swap Involved	Form Type	Code	Nature of Ownership	Explanation
Common Stock	Acquisiton	2021-03-11	75,000	$12.04	454,126	No	4	M	Direct
Common Stock	Disposition	2021-03-11	75,000	$39.39	379,126	No	4	S	Direct

Equity Swap Involved	Form Type	Code	Nature of Ownership	Explanation
No	4	M	Direct
No	4	S	Direct

Reported Derivative Transactions

Sec. Name	Sec. Type	Acquisiton - Disposition	Date	Amount	Price	Amount - 2	Price - 2
Common Stock	Stock Option (right to buy)	Disposition	2021-03-11	75,000	$0.00	75,000	$12.04

Remaning Holdings	Exercise Date	Expiration Date	Equity Swap Involved	Transaction Form Type	Transaction Code	Nature of Ownership
0	2019-07-15	2022-07-15	No	4	M	Direct

Reported Non-Derivative Holdings

Sec. Name	Remaning Holdings	Nature of Ownership	Explanation
Common Stock	6,000	Indirect	Held by spouse

Footnotes

Of the shares held as of March 11, 2021, 124,379 were issuable on vesting of restricted stock units granted under the 2012 Equity Incentive Plan and are subject to forfeiture.
The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $39.01 to $40.00, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price.