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Filing Details

Issuer

Cik	Name	Symbol	Sector (SIC)	IRS No
1094392	Rudolph Technologies Inc	RTEC	Industrial Instruments For Measurement, Display, And Control (3823)	223531208

Insiders

Cik	Name	Reported Address	Insider Title	Director	Officer	Large Shareholder	Other
1438856	Rajiv Roy	C/O Rudolph Technologies, Inc. One Rudolph Road, Po Box 1000 Flanders NJ 07836		No	No	No	Yes

Reported Non-Derivative Transactions

Sec. Name	Acquisiton - Disposition	Date	Amount	Price	Remaning Holdings	Equity Swap Involved	Form Type	Code	Nature of Ownership
Common Stock	Disposition	2011-02-28	100	$11.48	44,153	No	4	S	Direct
Common Stock	Disposition	2011-02-28	3,900	$11.08	40,253	No	4	S	Direct
Common Stock	Acquisiton	2011-03-01	8,838	$0.00	49,091	No	4	A	Direct

Equity Swap Involved	Form Type	Code	Nature of Ownership
No	4	S	Direct
No	4	S	Direct
No	4	A	Direct

Footnotes

On February 1, 2010, the Compensation Committee of Rudolph Technologies' Board of Directors established targets for the award of performance-based Restricted Stock Units ("RSU's") such that the number of RSU's issued under the award would be contingent on the Company achieving certain revenue and earnings per share goals as well as personal performance goals for fiscal year 2010 (the "Metrics"). Effective upon the receipt of the Company's 2010 audited financial results from its independent auditors, a final determination of the number of performance-based RSU's to be awarded was made based on achievement against the 2010 Metrics. The awarded performance-based RSU's are still subject to a service requirement such that the award shall vest with respect to twenty percent (20%) of the shares subject to the award (rounded down to the next whole number of shares) on March 1, 2011 and on each of the subsequent four (4) years vesting annually on February 1.