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Filing Details

Issuer

Cik	Name	Symbol	Sector (SIC)	IRS No
704532	Nanometrics Inc	NANO	Measuring & Controlling Devices, Nec (3829)	942276314

Insiders

Cik	Name	Reported Address	Insider Title	Director	Officer	Large Shareholder	Other
1347839	P James Moniz	C/O Nanometrics Incorporated 1550 Buckeye Drive Milpitas CA 95035	Chief Financial Officer	No	Yes	No	No

Reported Non-Derivative Transactions

Sec. Name	Acquisiton - Disposition	Date	Amount	Price	Remaning Holdings	Equity Swap Involved	Form Type	Code	Nature of Ownership	Explanation
Common Stock	Acquisiton	2010-08-19	49,999	$1.20	64,236	No	4	M	Direct
Common Stock	Disposition	2010-08-19	49,999	$13.72	14,237	No	4	S	Direct

Equity Swap Involved	Form Type	Code	Nature of Ownership	Explanation
No	4	M	Direct
No	4	S	Direct

Reported Derivative Transactions

Sec. Name	Sec. Type	Acquisiton - Disposition	Date	Amount	Price	Amount - 2	Price - 2
Common Stock	Non-Qualified Stock Option (right to buy)	Disposition	2010-08-19	49,999	$0.00	49,999	$1.20

Remaning Holdings	Exercise Date	Expiration Date	Equity Swap Involved	Transaction Form Type	Transaction Code	Nature of Ownership
50,001		2016-02-18	No	4	M	Direct

Footnotes

The sales reported in this Form 4 were effected pursuant to a Rule 10b5-1 trading plan adopted by James P. Moniz on February 24, 2010.
The price in Column 4 is a weighted average sale price. The prices actually received ranged from $13.62 to $13.92. The reporting person will provide to the issuer, any security holder of the issuer, or the SEC staff, upon request, information regarding the number of shares sold at each price within the range.
One-third of the shares subject to the option vest on February 18, 2010 and one thirty-sixth of the shares shall vest monthly thereafter.