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Filing Details

Issuer

Cik	Name	Symbol	Sector (SIC)	IRS No
1113232	Axcelis Technologies Inc	ACLS	Special Industry Machinery, Nec (3559)	341818596

Insiders

Cik	Name	Reported Address	Insider Title	Director	Officer	Large Shareholder	Other
1420601	A. Douglas Lawson	C/O Axcelis Technologies, Inc. 108 Cherry Hill Drive Beverly MA 01915	Evp, Corporate Mktg & Strategy	No	Yes	No	No

Reported Non-Derivative Transactions

Sec. Name	Acquisiton - Disposition	Date	Amount	Price	Remaning Holdings	Equity Swap Involved	Form Type	Code	Nature of Ownership
Common Stock	Acquisiton	2015-08-10	10,000	$1.60	28,598	No	4	M	Direct
Common Stock	Acquisiton	2015-08-10	12,500	$0.93	41,098	No	4	M	Direct
Common Stock	Acquisiton	2015-08-10	18,750	$1.99	59,848	No	4	M	Direct
Common Stock	Acquisiton	2015-08-10	10,752	$1.80	70,600	No	4	M	Direct
Common Stock	Disposition	2015-08-10	31,573	$3.28	39,027	No	4	S	Direct
Common Stock	Disposition	2015-08-10	18,896	$3.29	20,131	No	4	S	Direct
Common Stock	Disposition	2015-08-10	1,381	$3.30	18,750	No	4	S	Direct
Common Stock	Disposition	2015-08-10	152	$3.35	18,598	No	4	S	Direct
Common Stock	Acquisiton	2015-08-11	20,498	$1.80	39,096	No	4	M	Direct
Common Stock	Disposition	2015-08-11	17,898	$3.29	21,198	No	4	S	Direct
Common Stock	Disposition	2015-08-11	2,600	$3.30	18,598	No	4	S	Direct

Equity Swap Involved	Form Type	Code	Nature of Ownership
No	4	M	Direct
No	4	M	Direct
No	4	M	Direct
No	4	M	Direct
No	4	S	Direct
No	4	S	Direct
No	4	S	Direct
No	4	S	Direct
No	4	M	Direct
No	4	S	Direct
No	4	S	Direct

Reported Derivative Transactions

Sec. Name	Sec. Type	Acquisiton - Disposition	Date	Amount	Price	Amount - 2	Price - 2
Common Stock	Stock option (right to buy)	Disposition	2015-08-10	10,000	$0.00	10,000	$1.60
Common Stock	Stock option (right to buy)	Disposition	2015-08-10	12,500	$0.00	12,500	$0.93
Common Stock	Stock option (right to buy)	Disposition	2015-08-10	18,750	$0.00	18,750	$1.99
Common Stock	Stock option (right to buy)	Disposition	2015-08-10	10,752	$0.00	10,752	$1.80
Common Stock	Stock option (right to buy)	Disposition	2015-08-11	20,498	$0.00	20,498	$1.80

Remaning Holdings	Exercise Date	Expiration Date	Equity Swap Involved	Transaction Form Type	Transaction Code	Nature of Ownership
0	2015-07-15	2021-07-15	No	4	M	Direct
12,500	2015-07-16	2019-07-16	No	4	M	Direct
37,500	2015-07-15	2020-07-15	No	4	M	Direct
114,248	2015-07-15	2021-07-15	No	4	M	Direct
93,750	2015-07-15	2021-07-15	No	4	M	Direct

Reported Non-Derivative Holdings

Sec. Name	Remaning Holdings	Nature of Ownership	Explanation
Common Stock	12,500	Indirect	Held by spouse

Footnotes

50,000 stock options were granted on July 16, 2012 and vested as to 12,500 shares on each of July 16, 2013, 2014 and 2015. The remaining options for 12,500 shares will vest on July 16, 2016.
75,000 stock options were granted on July 15, 2013 and vested as to 18,750 shares on each of July 15, 2014 and 2015. The remaining options for 37,500 shares will vest as to 18,750 shares on each of July 16, 2016 and 2017.
125,000 stock options were granted on July 15, 2014 and vested as to 31,250 shares on July 15, 2015. The remaining options for 93,750 shares will vest as to 31,250 shares on each of July 15, 2016, 2017 and 2018.