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Filing Details

Issuer

Cik	Name	Symbol	Sector (SIC)	IRS No
704532	Nanometrics Inc	NANO	Measuring & Controlling Devices, Nec (3829)	942276314

Insiders

Cik	Name	Reported Address	Insider Title	Director	Officer	Large Shareholder	Other
1296648	V Norman Coates	C/O Nanometrics, Inc. 1550 Buckeye Drive Milpitas CA 95035		Yes	No	Yes	No
1399229	Trust Property Separate Coates J Vincent	C/O Nanometrics, Inc. 1550 Buckeye Drive Milpitas CA 95035		No	No	Yes	No

Reported Non-Derivative Transactions

Sec. Name	Acquisiton - Disposition	Date	Amount	Price	Remaning Holdings	Equity Swap Involved	Form Type	Code	Nature of Ownership	Explanation
Common Stock	Disposition	2010-06-21	50,000	$11.49	2,382,460	No	4	S	Indirect	See footnote

Equity Swap Involved	Form Type	Code	Nature of Ownership	Explanation
No	4	S	Indirect	See footnote

Reported Non-Derivative Holdings

Sec. Name	Remaning Holdings	Nature of Ownership	Explanation
Common Stock	4,052	Direct

Footnotes

The sales reported in this Form 4 were effected pursuant to a Rule 10b5-1 trading plan adopted by the Vincent J. Coates Separate Property Trust on February 23, 2010.
The price in Column 4 is a weighted average sale price. The prices actually received ranged from $11.12 to $12.09. The reporting person will provide to the issuer, any security holder of the issuer, or the SEC staff, upon request, information regarding the number of shares sold at each price within the range.
Shares held of record by the Vincent J. Coates Separate Property Trust, U/D/T dated August 7, 1981, for which Norman Coates and Stella Coates act as co-trustees.