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Filing Details

Issuer

Cik	Name	Symbol	Sector (SIC)	IRS No
1094392	Rudolph Technologies Inc	RTEC	Industrial Instruments For Measurement, Display, And Control (3823)	223531208

Insiders

Cik	Name	Reported Address	Insider Title	Director	Officer	Large Shareholder	Other
1438856	Rajiv Roy	C/O Rudolph Technologies, Inc. One Rudolph Road, Po Box 1000 Flanders NJ 07836		No	No	No	Yes

Reported Non-Derivative Transactions

Sec. Name	Acquisiton - Disposition	Date	Amount	Price	Remaning Holdings	Equity Swap Involved	Form Type	Code	Nature of Ownership
Common Stock	Disposition	2010-05-17	2,000	$9.20	13,778	No	4	S	Direct
Common Stock	Acquisiton	2010-05-21	15,250	$5.24	29,028	No	4	M	Direct
Common Stock	Disposition	2010-05-21	9,878	$8.20	19,150	No	4	S	Direct

Equity Swap Involved	Form Type	Code	Nature of Ownership
No	4	S	Direct
No	4	M	Direct
No	4	S	Direct

Reported Derivative Transactions

Sec. Name	Sec. Type	Acquisiton - Disposition	Date	Amount	Price	Amount - 2	Price - 2
Common Stock	Incentive Stock Option (right to buy)	Disposition	2010-05-21	15,250	$0.00	15,250	$5.24

Remaning Holdings	Exercise Date	Expiration Date	Equity Swap Involved	Transaction Form Type	Transaction Code	Nature of Ownership
0		2010-05-21	No	4	M	Direct

Footnotes

A) 5,700 restricted stock units vested and are included in the amount of shares of common stock beneficially owned.B) 6,829 shares acquired through Employee Stock Purchase Plan are included in the amount of shares beneficially owned.
Pursuant to a merger agreement by and among the August Technology Corporation ("August"), Rudolph Technologies, Inc. ("Rudolph") and NS Merger Sub, Inc., a wholly-owned subsidiary of Rudolph (the "Merger"), the option to purchase 20,000 shares of August common stock for $3.99 per share, initially granted by August on May 21, 2003, which was fully vested, was assumed by Rudolph in the Merger and replaced with the referenced fully vested option.