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Filing Details

Issuer

Cik	Name	Symbol	Sector (SIC)	IRS No
1049502	Mks Instruments Inc	MKSI	Industrial Instruments For Measurement, Display, And Control (3823)	042277512

Insiders

Cik	Name	Reported Address	Insider Title	Director	Officer	Large Shareholder	Other
1202768	Alexander John Smith	2 Tech Drive Andover MA 01810	V.p. & Chief Tech Officer	No	Yes	No	No

Reported Non-Derivative Transactions

Sec. Name	Acquisiton - Disposition	Date	Amount	Price	Remaning Holdings	Equity Swap Involved	Form Type	Code	Nature of Ownership
Common Stock	Acquisiton	2010-03-10	1,157	$0.00	1,157	No	4	M	Direct
Common Stock	Acquisiton	2010-03-10	1,667	$0.00	2,824	No	4	M	Direct
Common Stock	Disposition	2010-03-10	898	$19.07	1,926	No	4	F	Direct
Common Stock	Disposition	2010-03-11	1,926	$19.04	0	No	4	S	Direct

Equity Swap Involved	Form Type	Code	Nature of Ownership
No	4	M	Direct
No	4	M	Direct
No	4	F	Direct
No	4	S	Direct

Reported Derivative Transactions

Sec. Name	Sec. Type	Acquisiton - Disposition	Date	Amount	Price	Amount - 2	Price - 2
Common Stock	Restricted Stock Unit	Disposition	2010-03-10	1,157	$0.00	1,157	$0.00
Common Stock	Restricted Stock Unit	Disposition	2010-03-10	1,667	$0.00	1,667	$0.00

Remaning Holdings	Exercise Date	Expiration Date	Equity Swap Involved	Transaction Form Type	Transaction Code	Nature of Ownership
13,057			No	4	M	Direct
10,167			No	4	M	Direct

Footnotes

This transaction was effected pursuant to a Rule 10b5-1 trading plan previously adopted by the reporting person to satisfy tax withholding obligations.
Each restricted stock unit represents the contingent right to receive one share of common stock of MKS Instruments, Inc.
These RSUs are subject to the achievement of performance criteria determined in the first year of the grant and thereafter vests in equal annual installments over three years.
The RSUs vest in equal annual installments over three years.