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Filing Details

Issuer

Cik	Name	Symbol	Sector (SIC)	IRS No
909791	Ultratech Inc	UTEK	Special Industry Machinery, Nec (3559)	943169580

Insiders

Cik	Name	Reported Address	Insider Title	Director	Officer	Large Shareholder	Other
939376	W Arthur Zafiropoulo	3050 Zanker Road San Jose CA 95134	Chairman Of The Board And Ceo	Yes	Yes	No	No

Reported Non-Derivative Transactions

Sec. Name	Acquisiton - Disposition	Date	Amount	Price	Remaning Holdings	Equity Swap Involved	Form Type	Code	Nature of Ownership	Explanation
Common Stock	Disposition	2010-02-04	10,000	$14.01	1,262,981	No	4	S	Direct

Equity Swap Involved	Form Type	Code	Nature of Ownership	Explanation
No	4	S	Direct

Footnotes

The sales reported in this Form 4 were effected pursuant to a Rule 10b5-1 trading plan adopted by the Reporting Person in June 2009.
Represents the weighted average sale price per share. The actual sale prices ranged from a low of $14.00 to a high of $14.07 per share. The Reporting Person will provide upon request by the Securities and Exchange Commission, the Issuer or any security holder of the Issuer full information regarding the number of shares sold at each separate price.
Includes (i) 75,000 shares subject to restricted stock units which will vest in three (3) successive equal annual installments upon the Reporting Person's completion of each year of service with the Issuer over the three (3)-year period measured from January 1, 2008, and the shares underlying those vested units will be issued on January 31, 2011, and (ii) 100,000 shares subject to restricted stock units which will vest in three (3) successive equal annual installments upon the Reporting Person's completion of each year of service with the Issuer over the three (3)-year period measured from January 1, 2009, and the shares underlying those vested units will be issued on January 31, 2012.