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Filing Details

Issuer

Cik	Name	Symbol	Sector (SIC)	IRS No
1101302	Entegris Inc	ENTG	Plastics Products, Nec (3089)	411941551

Insiders

Cik	Name	Reported Address	Insider Title	Director	Officer	Large Shareholder	Other
1485428	James William Shaner	9754 Summit Ash Court Colorado Springs CO 80920	Vice President, Gm, Me Div.	No	Yes	No	No

Reported Non-Derivative Transactions

Sec. Name	Acquisiton - Disposition	Date	Amount	Price	Remaning Holdings	Equity Swap Involved	Form Type	Code	Nature of Ownership
Common Stock	Acquisiton	2011-02-22	10,046	$0.00	67,572	No	4	A	Direct
Common Stock	Disposition	2011-02-23	1,567	$8.40	66,005	No	4	S	Direct
Common Stock	Disposition	2011-02-23	4,134	$8.40	61,871	No	4	S	Direct
Common Stock	Disposition	2011-02-24	56	$8.34	61,815	No	4	S	Direct

Equity Swap Involved	Form Type	Code	Nature of Ownership
No	4	A	Direct
No	4	S	Direct
No	4	S	Direct
No	4	S	Direct

Reported Derivative Transactions

Sec. Name	Sec. Type	Acquisiton - Disposition	Date	Amount	Price	Amount - 2	Price - 2
Common Stock	Employee Stock Option (Right to Buy)	Acquisiton	2011-02-22	25,630	$0.00	25,630	$8.76

Remaning Holdings	Exercise Date	Expiration Date	Equity Swap Involved	Transaction Form Type	Transaction Code	Nature of Ownership
25,630		2018-02-19	No	4	A	Direct

Footnotes

These shares are restricted stock units with restrictions that lapse over a 4 year period with respect to 25% of these shares per year, starting on February 19, 2012.
This restricted stock unit award was made pursuant to an equity incentive award plan in consideration of services as an employee.
These shares were sold pursuant to a Rule 10b5-1 Trading Plan established by the Reporting Person on February 24, 2010.
The price reported in column 4 is a weighted average price reported in reliance on a letter from the Office of Chief Counsel, Securities and Exchange Commission's Division of Corporate Finance to the Society of Corporate Securities & Corporate Governance Professionals dated June 25, 2008. These shares were sold in multiple transactions at prices ranging from $8.09 to $8.76, inclusive. The reporting person undertakes to provide Entegris, Inc. any shareholder of Entegris, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in this footnote.
The option vests in 4 equal annual installments on February 19, 2012, February 19, 2013, February 19, 2014 and February 19, 2015.
These options were awarded pursuant to a stock option plan that provides for the award of options in consideration of services as an employee.