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Filing Details

Issuer

Cik	Name	Symbol	Sector (SIC)	IRS No
1113232	Axcelis Technologies Inc	ACLS	Special Industry Machinery, Nec (3559)	341818596

Insiders

Cik	Name	Reported Address	Insider Title	Director	Officer	Large Shareholder	Other
1158015	G Mary Puma	C/O Axcelis Technologies, Inc. 108 Cherry Hill Drive Beverly MA 01915	Chairman, President And Ceo	Yes	Yes	No	No

Reported Non-Derivative Transactions

Sec. Name	Acquisiton - Disposition	Date	Amount	Price	Remaning Holdings	Equity Swap Involved	Form Type	Code	Nature of Ownership	Explanation
Common Stock	Disposition	2013-03-18	14,573	$1.21	433,516	No	4	S	Direct

Equity Swap Involved	Form Type	Code	Nature of Ownership	Explanation
No	4	S	Direct

Reported Non-Derivative Holdings

Sec. Name	Remaning Holdings	Nature of Ownership	Explanation
Common Stock	20,000	Indirect	Held by spouse

Footnotes

This sale is pursuant to a prior election by the executive officer to sell shares issued on the vesting of restricted stock units in order to generate funds to pay to the Company to cover the executive's tax liability arising from the vesting event. The proceeds of this sale will be paid to the Company.
Of the shares held as of March 18, 2013, 110,728 were issuable on vesting of restricted stock units granted the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.