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Filing Details

Issuer

Cik	Name	Symbol	Sector (SIC)	IRS No
1094392	Rudolph Technologies Inc	RTEC	Industrial Instruments For Measurement, Display, And Control (3823)	223531208

Insiders

Cik	Name	Reported Address	Insider Title	Director	Officer	Large Shareholder	Other
1244761	Alan Robert Koch	One Rudolph Rd Po Box 1000 Flanders NJ 07836		No	No	No	Yes

Reported Non-Derivative Transactions

Sec. Name	Acquisiton - Disposition	Date	Amount	Price	Remaning Holdings	Equity Swap Involved	Form Type	Code	Nature of Ownership
Common Stock	Disposition	2013-02-28	1,750	$10.94	28,325	No	4	S	Direct
Common Stock	Disposition	2013-02-28	500	$10.95	27,825	No	4	S	Direct
Common Stock	Acquisiton	2013-03-01	2,400	$0.00	30,225	No	4	A	Direct

Equity Swap Involved	Form Type	Code	Nature of Ownership
No	4	S	Direct
No	4	S	Direct
No	4	A	Direct

Footnotes

This filing is made solely to amend the footnote for the filing on 3/1/2013 to state "On 1/25/2012, the Compensation Committee of Rudolph Technologies' Board of Directors established targets for the award of performance-based Restricted Stock Units such that the number of RSUs issued under the award would be contingent on the Company achieving certain revenue and non-GAAP earnings before interest and taxes goals for fiscal year 2012 (the "Metrics"). Effective upon the receipt of the Company's 2012 audited financial results from its independent auditors, a final determination of the number of performance-based RSUs to be awarded was made based on achievement against the 2012 Metrics. The awarded performance-based RSUs are still subject to a service requirement such that the award shall vest with respect to 20% of the shares subject to the award (rounded down to the next whole number of shares) on 3/1/2013 and on each of the subsequent four years vesting annually on January 25."