Axcelis Technologies Inc (ACLS)

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Institutional Investors' Holdings

Filing Period:

No.	Name	Shares	Value	% Port
1.	Blackrock, Inc.	5,447,229	$380,597,890	0%
2.	Vanguard Group Inc	4,396,134	$307,157,884	0%
3.	State Street Corp	1,301,188	$90,914,006	0%
4.	American Century Companies Inc	1,060,096	$74,068,908	0.04%
5.	Reinhart Partners, Inc.	1,036,112	$72,393,144	2.78%