Amtech Systems Inc (ASYS)

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Institutional Investors' Holdings

Filing Period:

No.	Name	Shares	Value	% Port
1.	Dimensional Fund Advisors Lp	931,198	$5,075,176	0%
2.	Vanguard Group Inc	670,784	$3,655,773	0%
3.	Pacific Ridge Capital Partners, Llc	652,393	$3,555,542	0.81%
4.	Geode Capital Management, Llc	132,756	$723,717	0%
5.	Blackrock, Inc.	120,520	$656,834	0%